Working Hours Monday - Friday 08:00-16:00
Toll Free

E-Beam Evaportion System


HANSLINK Co.,Ltd
.TEL: 886-937-119181
.FAX: 886-36688378
.EMAIL:harrison@hanslinkinc.com
.ADD:No. 46, Jiazheng 1st St., Zhubei City, Hsinchu County 302, Taiwan (R.O.C.)

 

1. The e-beam system is specifically designed for deposition of a wide variety of materials including metals, dielectrics, oxides, semiconductors and alloys for R&D laboratory and pilot production applications
2. The system is capable of uniform deposition of ≦±5% (center-to-edge)
3. The system can be configured with an ion source for ion-beam cleaning.
4. System is available with different vacuum pumps including mechanical, dry-pump, turbo-pump, and cryo-pump for high-vacuum and ultra-high vacuum applications
5. Additional features include versatility, ease of operation, and long term reliability for evaporation of single and multiple layers of thin or thick films

Wafer Size

6”

Ultimate Pressure

8E-7 Torr

Process Vacuum

5E-6 Torr in 40 min.

Substrate Rotate Rate

5~30rpm

Thickness Uniformity

±5%

Pocket Number and Size

4 or 6 pockets/ 7~25cc

Control System

PLC / PLC+PC

Optional

1.       Cooling System

2.       Ion Source

3.       Heating System








DOWNLOAD:

 BACK 

 

HANSLINK Co.,Ltd.Optical Communication|Vacuum System|Customized Solution
TEL:+886-937-119181.FAX:+886-36688378.EMAIL:harrison@hanslinkinc.com

ADD:No. 46, Jiazheng 1st St., Zhubei City, Hsinchu County 302, Taiwan (R.O.C.) 

【COPYRIGHT 2019 ALL RIGHTS RESERVED|Web Design 6000